| Multiple Probes
Spectrophotometer System (MPSS) The MPSS system has been installed and accepted throughout the
semiconductor industry, with many international and domestic installations
for "End Point" process applications such as chemical mechanical polish (CMP),
photo-resist coating, thickness measurements, and plasma etching
fabrications.
There are 5 spectrometers in an MPSS system. The typical spectral range
is from 500 to 950nm. Other ranges are available depending on the
application requirements. The MPSS incorporates a high speed spectral
acquisition driver that can obtain 5 scans simultaneously from each probe in
just 12.5 ms. This provides the fastest data collection possible to meet the
high throughput requirements for the modern production environment.
The MPSS operating software can be customized for specific needs using
the powerful Visual Basic platform. It has "change on site" capabilities.
Working with the Microsoft office package it can link the ACCESS database
and EXCEL spreadsheet programs together using the OLE method, so the data
can be exported to standard database and spreadsheet formats without extra
layers of software.
The MPSS incorporates fiber optic reflectance probes designed to carry
signal for up to 400 feet. This allows a hazardous sample environment to be
linked to an office site for data analysis and network distribution.
|
